A High-Performance Piezoelectric Micropump with Multi-Chamber in Series

Based on the multi-chamber series structure, a piezoelectric micropump with high output performance is proposed in this paper. The composed of circular unimorph vibrator, cantilever check valve, and pump body. First, working process was analyzed detail. Then, effect key dimension parameters explored. mainly refer to height chamber valve opening (the deformation size valve). Finally, experimental prototypes different were fabricated for evaluation micropump. results show that when 0.1 mm 0.4 mm, has good comprehensive performance. In particular, at 170 V 120 Hz, maximum flow rate dual-chamber 65.5 mL/min, 100 pressure reaches 59.1 kPa. Moreover, certain voltage V, drive frequency 450 Hz 550 four-chamber reach 110 mL/min exceed 140 kPa, respectively. addition, volumes single-chamber, series, micropumps are 22 × 5 32.6 53.8 advantages simple low cost, miniaturization, performance, thus gaining potential practicality biomedical applications, cooling systems, fuel supply, chemical etc.